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用核反应分析（ＮＲＡ）、前向反冲分析法（ＥＲＤ）、背散射谱法（ＲＢＳ）等离子束分析方法研究了ＴｉＤｘ／Ｍｏ样品中氘的行为。结果表明，在以化学形式存在的ＴｉＤｘ／Ｍｏ样品中氘均匀分布。在ＴｉＤ１．５／Ｍｏ膜表面存在一层２６ｎｍ的氧化层，氧含量为１．４×１０１７ｃｍ－２。达到氘化钛大量明显分解温度（３４３℃）时，氘在氘化钛中扩散系数为２．３×１０－８ｃｍ２／ｓ，表面复合系数为１．９×１０－２７ｃｍ４／ｓ。扩散系数与温度呈指数关系Ｄ＝Ｄ０ｅ－Ｅ／ｋＴ。随着表面氧含量的增加，氘在氘化钛表面复合系数逐渐减小。在ＴｉＤ１．５／Ｍｏ样品表面镀上一层约８０ｎｍ的铜膜后，复合系数增大。
Deuterium behavior in TiDx / Mo samples was studied by nuclear reaction analysis (NRA), forward recoil analysis (ERD), backscatter spectroscopy (RBS) and plasma beam analysis. The results show that deuterium is uniformly distributed in the chemically-present TiDx / Mo samples. There is a 26nm oxide layer on the surface of TiD1.5 / Mo film with an oxygen content of 1.4 × 1017cm-2. The deuterium diffusion coefficient in deuterated titanium was 2.3 × 10 -8 cm 2 / s and the surface recombination coefficient was 1.9 × 10 -2 7 cm 4 / s when a large amount of apparent decomposition temperature (343 ° C) of deuterated titanium was reached. Diffusion coefficient and temperature exponential relationship D = D0e-E / kT. With the increase of surface oxygen content, the deuterium composite coefficient on the surface of deuterated titanium gradually decreases. After the TiD1.5 / Mo sample is coated with a layer of about 80nm copper film, the recombination coefficient increases.