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一、工作原理和用途在一个封闭的容器内获得高真空后,将团体表面沉积上一层金属薄膜,称为真空镀膜。镀膜的方法一般可分为蒸发和溅射两种。我们采用的是蒸发法,即在真空中将金属材料加热到适当的温度后,材料蒸发形成蒸汽分子,由于工件表面温度较低,蒸汽分子凝固在被镀工件表面而形成薄膜。对于这种设备的真空系统最基本的要求,是要有较高的极限真空(一般在10~(-5)乇以上)
First, the working principle and purpose In a closed container to obtain a high vacuum, the surface of the body deposited on a layer of metal film, known as the vacuum coating. Coating method generally can be divided into two kinds of evaporation and sputtering. We use the evaporation method, that is, the metal material is heated to a proper temperature in vacuum, the material evaporates to form steam molecules. Due to the low temperature of the surface of the workpiece, the steam molecules solidify on the surface of the workpiece to be plated to form a film. The most basic requirement for the vacuum system of such equipment is to have a higher ultimate vacuum (typically above 10 -5 Torr)