Multi-frequency lateral shear interferometer system for simultaneous measurement of thickness and th

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This Letter demonstrates a novel lateral shear interferometer system for simultaneous measurement of three-dimensional (3D) shape and thickness of transparent objects. Multi-frequency fringe patterns can be created by tilting mirrors at different inclination angles. With a single camera, the multi-frequency fringes are recorded in one image. The phase-shift of the fringes can be generated synchronously only by moving a plane-parallel plate along an in-plane parallel direction. According to the feature of transparent materials, the thickness and 3D shape can be reconstructed simultaneously based on the relationship between the in-plane displacement and their characteristics. The experiment was conducted on a thin transparent film subjected to a shearing force, which verifies the feasibility of the proposed system.
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