机械、电器、无线电、轻工及仪表等行业都需要使用大量的模具,但由于摩擦、粘附及氧化使模具寿命大大降低。为了提高其耐磨性和使用寿命,国外近10几年来采用化学气相沉积法(简称CVD法)在模具表面上涂复几微米到十几微米的耐磨硬质涂层,如TiC,TiN或TiC+TiN等,可提高模具使用寿命几倍到几十倍。欧美各国、苏联、日本都投入大量人力和物力研究CVD原理、工艺及设备。 TiC,TiN或Ti+TiN等涂层具有高熔点(>2000°)、高硬度(Hv>2000kg/mm~2)、 Mechanical, electrical, radio, light industry and instrumentation industries need to use a large number of molds, but due to friction, adhesion and oxidation greatly reduce the mold life. In order to improve its wear resistance and service life, nearly 10 years abroad by chemical vapor deposition (CVD method) in the mold surface coated with a few microns to ten microns wear-resistant hard coatings, such as TiC, TiN or TiC + TiN, etc., can improve the life of the mold several times to several times. Europe and the United States, the Soviet Union, Japan have invested a lot of manpower and material resources to study CVD principles, processes and equipment. Coatings such as TiC, TiN or Ti + TiN have a high melting point (> 2000 °) and a high hardness (Hv> 2000 kg / mm 2)