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本文对容栅传感器误差因素进行全面分析,从设计,工艺和材料三方面提出修正方法,并在容栅式数显卡尺上应用,取得较好效果。
In this paper, a comprehensive analysis of the error factors of the capacitive grid sensor is made, and the correction methods are put forward from the aspects of design, process and material, and applied to capacitive grid digital calipers to achieve better results.