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文中介绍一种无接触测量机械部件微运动情况的光纤Michelson干涉测量方法的原理、实验装置和实验结果。根据计算和实验研究，对应不同的样品反射率提出了两种不同的实验装置方案。该实验装置已初步在微电子机械系统的研究中发挥作用。
In this paper, the principle, experimental setup and experimental results of a Michelson interferometer interferometer for the non-contact measurement of micro-motion of mechanical parts are introduced. According to computational and experimental studies, two different experimental setups were proposed for different sample reflectivities. The experimental device has initially played a role in the research of microelectromechanical systems.