硅基(SOI)波导是近年集成光电子和集成波导的重要方向。对硅基纳米波导进行数值计算,讨论了空气包层和SiO2包层两种情况的双模传输特性,得到两种包层结构的双模工作区域和双模拍长与波导结构的关系。研究了SOI纳米波导中双模干涉现象以及双折射和温度对双模干涉的影响。 Silicon-based (SOI) waveguides in recent years integrated optoelectronic and integrated waveguide is an important direction. The numerical calculation of silicon-based nano-waveguide is carried out. The dual-mode transmission characteristics of the air-cladding and the SiO2-cladding are discussed. The relationship between the dual-mode working area and the dual-mode beacons and the waveguide structure is obtained. The effects of bimodal interference and birefringence and temperature on the bimodal interference in SOI nano-waveguide were investigated.