论文部分内容阅读
为减少射频螺旋电感的金属导体损耗,提出了一种电感金属线宽及金属间距从外到内逐渐变小的新颖结构.与传统的固定金属线宽和间距的电感相比,该渐变结构电感涡流效应的影响较小,金属导体损耗减小,从而降低其串联电阻,品质因子Q值提高.实验结果确证了所提方法的正确性.对一个高阻硅衬底上6nH电感,优化设计的渐变结构电感Q值在2.46GHz处可达到14.25,比版图面积相同、固定线宽及间距的传统电感高11.3%.因此,在无线通信系统的射频前端,采用这种电感与射频集成电路结合,能获得更好的射频电路性能.
In order to reduce the metal conductor loss of the RF spiral inductor, a novel structure of the inductor metal line width and the metal pitch tapering from the outside to the inside is proposed. Compared with the traditional fixed line width and spacing inductance, The effect of eddy current is less, the loss of metal conductor is reduced, and the series resistance is decreased, and the quality factor Q value is increased.The experimental results confirm the correctness of the proposed method.Optimized the design of 6nH inductor on a high resistance silicon substrate The Q value of the gradient structure inductor can reach 14.25 at 2.46GHz, which is 11.3% higher than that of the conventional layout with fixed line width and pitch. Therefore, in the radio frequency front end of the wireless communication system, this inductance is combined with the radio frequency integrated circuit, Can get better RF circuit performance.