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采用了激光微细熔覆柔性布线技术,结合数控CAD/CAM功能,在无掩模的基础上实现了在绝缘基板上直写厚膜电阻和电极单元,但由于激光和电阻材料的相互作用是一个传热传质的复杂过程,电阻和电极问的界面行为将严重地影响该元件的可靠性和再现性等。针对上述情况,本文通过优化工艺设计方案进行电阻和电极的直写,井从电阻和电极界面的结合行为以及对形成电阻的表面性能、电气性能的影响进行分析和讨一论。结果表明采用该优化工艺所制备的电阻和电极结合良好,性能和质量可靠稳定。
Using laser micro-cladding flexible wiring technology, combined with numerical control CAD / CAM function, on the basis of maskless realization of the direct write thick film resistor and electrode unit on the insulating substrate, but the laser and the resistance material interaction is a The complicated process of heat and mass transfer, the interfacial behavior between resistance and electrode, will seriously affect the reliability and reproducibility of the device. In view of the above situation, this article through the optimization of process design for direct write resistance and electrodes, wells from the combination of resistance and electrode interface behavior and the formation of resistance on the surface performance, electrical performance analysis and discussion. The results show that the use of the optimized preparation of the resistance and the electrode combination of good performance and quality of reliable and stable.