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投影透镜系统的改进,使片子步进机实现了更高的图形微细加工水平,且普遍改进了片子步进机在超大规模集成电路制造中对于更高集成度片子的加工精度和通用性。
Improvements in projection lens systems have enabled film stepping machines to achieve higher levels of graphics microfabrication and have generally improved the accuracy and versatility of film stepping machines in the fabrication of very large scale integrated circuits for higher integration films.