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美休斯实验室试制了 CCD 和液晶相结合的64×64象素的反射型光阀,它是一种能快速地把电信号转换成平面图形的空间光调制器。目标是用在通过相干光高速地进行雷达信号处理的装置和投射型的大型显示器内。构造复杂,在π型 Si 衬底的 Si 外延层上形成 CCD。衬底的另一侧上,通过 SiO_2而设置光阻层、多层电介质镜、液晶、透明电极、玻璃板。通过输入串-并联寄存器输向 CCD 输入64×64象素,其后,加偏压使栅为存储状态。这样,各象
The United States-Hughes Laboratory trial-manufacture CCD and liquid crystal 64 × 64 pixel reflective light valve, it is a kind of spatial light modulator can quickly convert electrical signals into a planar pattern. The goal is to use devices and projection-type large displays that perform radar signal processing at high speeds with coherent light. The structure is complicated and a CCD is formed on the Si epitaxial layer of the pi-type Si substrate. On the other side of the substrate, a photoresist layer, a multilayer dielectric mirror, a liquid crystal, a transparent electrode and a glass plate are provided through SiO 2. Input the serial-parallel register to the CCD input 64 × 64 pixels, then bias the gate so that the storage state. In this way, each image