Perovskite solar cells with TiO2 electron trans-port layers exhibit power conversion efficiency (PCE) as high as 22.7％ in single cells. However, the preparation process of the TiO2 layer is adopted by an unscalable method or requires high-temperature sintering, which pre-cludes its potential use for mass production of flexible devices. In this study, a scalable low-temperature soft-cover-assisted hydrolysis (SAH) method is presented, where the precursor solution is sandwiched between a soft cover and preheated substrate to form a closed hydrolysis environment. Compact homogeneous TiO2 films with a needle-like structure were obtained after the hydrolysis of a TiCl4 aqueous solution. Moreover, by careful optimization of the TiO2 fabrication conditions, a high PCE of 14.01％could be achieved for a solar module (4 × 4 cm2) prepared using the SAH method. This method provides a novel approach for the efficient scale-up of the low-temperature TiO2 film growth for industrial applications.