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真空溅射镀膜设备中加热装置在镀膜时常出现打火现象，本文采用金属屏蔽和外壳接地的方法很好地解决了这一问题。
Vacuum sputtering equipment in the heating device coating often appear in the phenomenon of ignition, this paper uses a metal shield and shell grounding method to solve this problem.