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本文用X射线光电子能谱(XPS)对用1—羟基乙叉—1.1—二膦酸(HEDP)电抛光液时,当HEDP的浓度、电抛光液的pH值、和电抛光液中“接受体”(H_3PO_4、HEDP和H_3PO_4+HEDP)种类等条件变化下,所得电抛光铜表面作磷的检测。结果表明,除低浓度HEDP电抛光液外,铜表面都不存在磷,这表明电抛光过程中形成的粘液膜是可溶性的,它很容易被清洗除去。在H_3PO_4+HEDP电抛光液中获得的粘液膜在高温下具有良好的成膜特性和导电性能,适于电子能谱的测定。结合Ar~+溅射剥蚀技术,测定了不同深度(即相当于不同溅射时间)膜层的组成,并由组成恒定区确定了粘液膜的组成。由此推断它是一种多核聚合配合物,其结构单元接近于[Cu_4(PO_4)(HEDP)]。
In this paper, X-ray photoelectron spectroscopy (XPS) when using 1-hydroxyethylidene-1,1-diphosphonic acid (HEDP) electropolishing solution, when the HEDP concentration, electropolishing solution pH, Body "(H_3PO_4, HEDP and H_3PO_4 + HEDP) species and other conditions change, the resulting electro-polished copper surface for phosphorus detection. The results show that there is no phosphorus present on the copper surface except for the low concentration HEDP electro-polishing solution, indicating that the mucoid membrane formed during electropolishing is soluble and can be easily removed by washing. The mucous membrane obtained in the H_3PO_4 + HEDP electro-polishing liquid has good film-forming property and electrical conductivity at high temperature, which is suitable for the determination of electron spectroscopy. Combined with Ar ~ + sputter-ablation technique, the composition of the coatings at different depths (ie, equivalent to different sputtering times) was determined and the composition of the mucus membranes was determined from the constitutive constants. It can be inferred that it is a kind of multi-core polymeric complexes with structural units close to [Cu_4 (PO_4) (HEDP)].