冷阴极溅射离子泵是获得无油超高真空的重要工具之一。随着电真空器件的进一步发展,它越来越广泛地被应用于电真空工业中。但目前有关冷阴极溅射离子泵的设计理论还不十分完善,磁路设计在几何形状复杂多样的情况下,理论计算繁杂,与实际出入也大。在生产实践中,有不少参数和尺寸 Cold cathode sputtering ion pumps are one of the most important tools for obtaining an ultra-high vacuum without oil. With the further development of electric vacuum devices, it is more and more widely used in the electric vacuum industry. However, the design theory of cold cathode sputtering ion pump is not yet perfect at present. The magnetic circuit design is complicated in theory and complicated in fact with different geometries. In production practice, there are many parameters and sizes