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针对目前大多数标准漏孔的漏率都是在He和入口压力为100 kPa下的漏率,采用定容变压法校准了铭牌漏率为2.3×10~(-6)Pa·m~3/s的标准真空漏孔在使用H_2、He、D_2三种气体时,在不同入口压力下的漏率。预先对系统进行了加热除气后计算了系统本底漏率大小,并探讨了本底漏率对校准漏孔漏率的影响。结合粘滞流-分子流理论研究了不同气体和漏孔入口压力对漏孔漏率的影响。
According to the leak rate of most standard leaky holes at present, the leakage rate under He and the inlet pressure is 100 kPa. The leak rate of the nameplate is calibrated by the constant capacitance and pressure transformation method to 2.3 × 10 -6 Pa · m 3 / s standard vacuum leak in the use of H_2, He, D_2 of three gases at different inlet pressure leak rate. After systematically heating and degassing the system, the system background leakage rate was calculated, and the effect of the background leakage rate on the calibration leak rate was discussed. Based on the theory of viscous flow and molecular flow, the influence of inlet pressure of different gas and leak hole on the leak rate of leaky hole was studied.