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根据传输线中高频电磁波的传播理论及网络理论分析了射频(RF)激励CO2激光器中的阻抗匹配问题,获得了等效阻抗匹配网络的设计方法及计算有关参数的普遍表达式。这一结果同样适用于其它高频激励CO2激光器的阻抗匹配网络的参数计算
According to the propagation theory of high frequency electromagnetic wave in transmission line and network theory, the impedance matching problem in RF excitation CO2 laser is analyzed. The design method of equivalent impedance matching network and the general expression for calculating relevant parameters are obtained. This result is also applicable to the parameter calculation of the impedance matching network of other high-frequency excited CO2 lasers