硅烷系统的弱点是易受污染。很易起反应的硅烷分子和氧、水及其它气体化合,自然地形成别的化合物。这些化合物,例如二氧化硅在系统中形成固体污染,成为测量和控制设备的许多问题的原因。亚微米尺寸的微粒能穿过滤净器或者能在滤净器的接头处形成反应。因此,问题是存在的,即使整个系统不过滤,适当使用滤净器也是有用处。污染的两个主要的原因是漏泄和没有纯化的气体。这些问题及其解决讨论如下。漏泄在纯化气体系统中不能容许接头处有漏泄。通常认为系统压力高于周围压力就可以预防漏泄流进入系统,而只能往系统外泄漏。因为硅烷系统中的氧和水蒸汽的分压力基 The weakness of the silane system is that it is susceptible to contamination. Very reactive silane molecules and oxygen, water and other gas compounds, the natural formation of other compounds. These compounds, such as silica, form a solid contaminant in the system that is responsible for many of the problems of measuring and controlling equipment. Submicron sized particles can pass through the filter or can form a reaction at the filter’s connector. Therefore, the problem is there, even if the entire system is not filtered, the appropriate use of filter is also useful. The two main causes of pollution are leaking and unpurified gases. These issues and their solutions are discussed below. Leakage Purified gas system can not allow leakage at the joints. It is generally assumed that the system pressure is higher than the ambient pressure to prevent leakage flow into the system, but only to the outside of the system. Because of the partial pressure of oxygen and water vapor in the silane system