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基于氧化锌薄膜紫外光发光的实现,ZnO薄膜成为新的研究热点。综述了各种沉积条件对脉冲激光沉积(PLD)技术生长的氧化锌薄膜的微结构、光学和电学性质的影响,ZnO薄膜的厚度在超过400 nm时,呈现出了近似块状的性质。采用PLD技术,可以在适当的条件下制备具有特定功能的氧化锌薄膜。
Based on the realization of zinc oxide thin film ultraviolet light, ZnO thin film has become a new research hotspot. The effects of various deposition conditions on the microstructure, optical and electrical properties of zinc oxide thin films grown by pulsed laser deposition (PLD) are reviewed. The ZnO thin films show an approximately block-like shape when the thickness exceeds 400 nm. With PLD technology, zinc oxide films with specific functions can be prepared under appropriate conditions.