提出了一种考虑温度影响的基于光子晶体的微压力传感器,传感器由微压力传感和温度传感两部分构成,其中微压力传感部分测量的是所处温度环境下的压力值。两部分传感器均利用波导和腔的耦合实现带阻滤波功能,根据带阻滤波器的模式在所处温度下线性红移,分别计算相应的温度值和该温度下的压力值,并通过热光效应和热膨胀效应计算出温度对器件材料折射率的影响,从而得到真实的微压力。文中对结构参数进行了优化设计,实现了1.33nm/μN的微压力灵敏度。 A photonic crystal-based micro-pressure sensor considering the influence of temperature is proposed. The sensor consists of micro-pressure sensing and temperature sensing. The micro-pressure sensing part measures the pressure in the temperature environment. Both sensors use the coupling between the waveguide and the cavity to achieve the band-stop filtering function. According to the mode of the band-stop filter, the two sensors are linearly red-shifted at the temperature, and the corresponding temperature and the pressure at the temperature are calculated respectively. Effects and Thermal Expansion Effects The effect of temperature on the refractive index of the device material is calculated, resulting in true micro-pressure. In this paper, the structural parameters were optimized and the micro-pressure sensitivity of 1.33nm / μN was achieved.