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用掩模分离方法或薄膜刻蚀方法制作出多波段微型滤光片列阵,将这类微型焦平面色散元件与列阵探测器结合,构成光谱可识别列阵探测器,报道了3通道短波红外滤光片列阵的设计和制作,以及4元3通道光谱可识别探测器的研制.
A mask separation method or a thin film etching method is used to fabricate a multi-band micro-filter array. The micro-scale planar dispersive elements are combined with an array detector to form a spectrum-recognizable array detector, and three-channel shortwave Infrared filter array design and production, as well as 4 yuan 3-channel spectrum detector can be identified.