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提出和建立了基于白光干涉的自稳定定量相位成像系统。该系统以柯勒照明的白光迈克耳孙干涉计为基础,使用自稳定锁相电路以减少相位噪音,引入相移装置获得定量的相位图像。实验分别以平面镜、标准测试图和聚苯乙烯小球为样品,获得了清晰的定量相位图像,实现了对样品的实时观测。该装置采用卤素灯照明,达到轴向分辨力5 nm,系统中的柯勒照明结构使其具有高空间相干性。实验结果表明,该装置能有效避免系统中其他光学表面(如系统中的透镜表面)干扰信号的影响。
A self-stable quantitative phase imaging system based on white light interference is proposed and established. Based on the Kohl - White interference Michelson interferometer, the system uses a self - stabilized phase - locked circuit to reduce the phase noise and introduce a phase shift device to obtain a quantitative phase image. Experiments were flat mirror, standard test chart and polystyrene beads as samples, obtained a clear quantitative phase images, to achieve real-time observation of the sample. The device uses halogen lighting, axial resolution of 5 nm, the system of Kohl lighting structure to make it with high spatial coherence. The experimental results show that the device can effectively avoid the impact of the signal from other optical surfaces in the system (such as the lens surface in the system).