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采用合适的离子束辅助沉积(IBAD)参数在K9基底上镀制了高激光损伤阈值的中心波长1053 nm的增透膜,分别从光谱性能、吸收性能、抗激光损伤阈值(LIDT)以及退火后的影响等方面与未进行离子束辅助沉积的薄膜进行对比分析。实验结果发现,采用离子辅助制备的薄膜放置80 d后具有更好的光谱稳定性,与未进行离子束辅助镀制的薄膜相比,平均吸收下降了57%,吸收值偏高的奇异点明显减少;损伤阈值提高了60%,用Leica偏振光学显微镜观察50%损伤几率的能量下破斑形貌,发现经过离子束辅助制备的样品破斑形状整齐且缺陷点少;未进行离子束辅助制备的样品退火后吸收降低,阈值提高,但奇异点没有减少,辅助样品变化不大。由此可知,离子辅助有助于制备高性能基频增透膜。
The anti-laser damage threshold (LIDT) and anti-laser damage threshold (LIDT) of the antireflective coating were coated on the K9 substrate with the appropriate laser beam assisted deposition (IBAD) Of the impact and other aspects with the ion beam-assisted deposition of comparative analysis of the film. The experimental results showed that the film prepared by ion-assisted deposition had better spectral stability after 80 d, and the average absorption decreased by 57% compared with the film without ion beam-assisted plating. The singularity with high absorption value was obvious The damage threshold was increased by 60%. The morphology of the rupture spot under 50% damage probability was observed by Leica polarized light microscope. It was found that the specimen spotted by ion beam assisted was neat and had fewer defects. Of the sample after annealing decreased, the threshold increased, but the singularity did not decrease, the auxiliary sample changed little. This shows that ion-assisted preparation of high-performance anti-reflection film at the base.