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讨论了离子注入机用三间隙强流离子加速管的聚焦特性 ,计算了各种能量离子束聚焦情况 ,并分析了抑制空间电荷效应所需要的电场强度。最后总结了三间隙加速管设计和调试应注意的问题。
The focusing characteristics of ion implanter with triple-gap intense ion accelerator were discussed. The focusing conditions of various energy ion beams were calculated, and the electric field intensity needed to suppress the space charge effect was analyzed. Finally, the problems that should be paid attention to in the design and debugging of triple gap accelerating tube are summarized.