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用溶胶-凝胶法制备了TiO_2薄膜,对经针状电极预电离产生的非平衡大气压氧等离子体射流净化该TiO_2膜进行了研究。用水接触角、表面形貌和X射线光电子能谱检测了氧等离子体与薄膜的相互作用。在氧等离子体和薄膜相互作用2 min后,经XPS观察到新的Sn3d与Nl s峰,但没有Ti3p信号,这说明经2min等离子体处理后,50nm厚的TiO_2薄膜已被除去。而涂有油和硬脂酸污染物的膜,经1min等离子体处理后,Ols和Ti3p信号没有改变。水接触角的减少和表面形貌的光滑可视为污染物的去除。从大气压氧等离子体中激发态氧能有效地除去污染物,证明这是清洗TiO_2膜上污染物的新途径。
The TiO_2 films were prepared by sol-gel method and the TiO_2 films were purified by non-equilibrium atmospheric pressure oxygen plasma jet generated by the pre-ionization of the needle electrodes. The contact angle of oxygen, surface morphology and X-ray photoelectron spectroscopy were used to detect the interaction between oxygen plasma and the film. After oxygen plasma and membrane interaction for 2 min, new Sn3d and Nls peaks were observed by XPS, but no Ti3p signal was observed, indicating that the 50nm-thick TiO2 thin film has been removed after 2min plasma treatment. The membrane coated with oil and stearic acid contaminants, after 1min plasma treatment, Ols and Ti3p signal has not changed. The reduction of water contact angle and the smoothness of the surface topography can be regarded as the removal of pollutants. The excited oxygen from the atmospheric oxygen plasma can effectively remove the pollutants, proving that this is a new way to clean the pollutants on the TiO_2 membrane.