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用化学溶液分解 (CSD)法制备 Pb(Zr0 .5 Ti0 .5 ) O3 (PZT)和 Bi2 Ti2 O7薄膜 ,利用 X-射线衍射技术研究了以 Bi2 Ti2 O7为籽晶层的 PZT薄膜的结晶性。实验结果表明 ,以高 (111)取向的 Bi2 Ti2 O7为籽晶层可获得高结晶性的 PZT薄膜 ,在 75 0°C退火 10 min的 PZT/Bi2 Ti2 O7薄膜具有单一的钙钛矿相。
Pb (Zr0.5Ti0.5) O3 (PZT) and Bi2Ti2O7 thin films were prepared by chemical solution decomposition (CSD). The crystallinity of PZT thin films with Bi2Ti2O7 as seed layer was investigated by X-ray diffraction . The experimental results show that PZT films with high crystallinity can be obtained by using Bi 2 Ti 2 O 7 with high (111) orientation as seed layer, and PZT / Bi 2 Ti 2 O 7 films annealed at 75 0 ° C for 10 min have a single perovskite phase.