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基于斐索干涉原理建立了可用于nm量级微位移测量的光纤式斐索干涉仪,并将其应用于激光激发超声表面波的非接触光学探测。在实验上,测量了脉冲激光在铝块表面上激发的超声表面波波形,根据波形算得瑞利波在铝中的传播速度为2.97×103m/s,与理论值2.93×103m/s相比,偏差小于2%。实验结果表明光纤式斐索干涉仪是非接触探测激光超声表面波的一种有效途径。
Based on the principle of Fizeau interference, a fiber-optic Fizeau interferometer that can be used to measure microdisplacements in nm is established and applied to non-contact optical detection of laser-induced ultrasonic surface wave. Experimentally, the ultrasonic surface wave excited by pulsed laser on the surface of aluminum block was measured. According to the waveform, the velocity of Rayleigh wave propagating in aluminum was 2.97 × 103m / s. Compared with the theoretical value of 2.93 × 103m / s, Less than 2% deviation. The experimental results show that the fiber Fizeau interferometer is an effective way of non-contact detection of laser ultrasonic surface wave.