【摘 要】
：
A new composition content quateary-alloy-based phase change thin film, Sb-rich AgInSbTe, has been prepared by DC-magnetron sputtering on a K9 glass substrate. A
【机 构】
：
Laboratory for High Density Optical Storage, Shanghai Institute of Optics and Fine Mechanics, Chines
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A new composition content quateary-alloy-based phase change thin film, Sb-rich AgInSbTe, has been prepared by DC-magnetron sputtering on a K9 glass substrate. After the film has been subsequently annealed at 200 ℃ for 30min,it becomes a crystalline thin film. The diffraction peak of antimony (Sb) are observed by shallow (0.5 degree) x-ray diffraction in the quateary alloy thin film. The analyses of the measurement from differential scanning calorimetry (DSC) show that the crystallization temperature of the phase change thin film is about 190C and increases with the heating rate. By Kissinger plot, the activation energy for crystallization is determined to be 3.05eV. The refiectivity,refractive index and extinction coefficient of the crystalline and amorphous phase change thin films are presented.The optical absorption coefficient of the phase change thin films as a function of photon energy is obtained from the extinction coefficient. The optical band gaps of the amorphous and crystallization phase change thin films are 0.265eV and 1.127eV, respectively.
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