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由中国电子学会半导体与集成技术学会、中国电子学会电子材料学学会和福建省科委联合举办的第五届全国集成电路和硅材料学术年会于1987年11月24日至28日在福建省福州市举行。出席会议的高等院校、研究所、工厂的代表300余人,国内一些知名的学者、专家参加了会议,并作了专题学术报告。 大会对收到的论文邀请学者、专家和科技人员进行评审,会议出版了“第五届全国半导体集成电路和硅材料学术会议论文集”。共收入论文报告306篇,其中特邀报告7篇,硅材料及其性质研究40篇,理化分析44篇,MOS集成电路研究82篇,双极型集成电路研究38篇,集成电路工艺95篇。
The 5th National Conference on Integrated Circuits and Silicon Materials, jointly organized by the Institute of Semiconductor and Integrated Technology of the Chinese Institute of Electronics, the Institute of Electronic Materials of the Chinese Society of Electronics and the Fujian Provincial Science and Technology Commission, was held on November 24 and 28, 1987 in Fujian Province Fuzhou held. More than 300 representatives from institutions of higher learning, institutes and factories attended the conference. Some well-known domestic scholars and experts attended the conference and made special academic reports. The conference invited scholars, experts and scientific and technological personnel to review the accepted papers. The conference published the Proceedings of the Fifth National Conference on Semiconductor Integrated Circuits and Silicon Materials. A total of 306 papers were reported, including 7 invited reports, 40 silicon materials and their properties, 44 physical and chemical analyzes, 82 MOS integrated circuits, 38 bipolar integrated circuits and 95 integrated circuit technologies.