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由于微机电系统(MEMS)陀螺通常采用微加工工艺生产制造,因此总是受微加工过程带来的的各种精度缺陷影响。对于MEMS陀螺,其零位输出误差因受环境因素影响而无法保持稳定,随时间表现出漂移特性,这种特性严重限制了MEMS陀螺在更高精度应用中的可用性。该文研究了一种改善MEMS陀螺零位误差温度稳定性的方法。通过分析陀螺运动特性及主要误差源,阐明陀螺驱动力对检测方向的耦合作用是零偏误差同相分量产生并随温度漂移的主要原因之一。为抑制陀螺驱动力耦合作用,提出对陀螺检测轴施加补偿静电力的方法。温度试验结果表明:施加补偿作用后,陀螺零偏误差同相分量的温度稳定性在12～60℃范围内提高了3倍以上。
Micro-Electro-Mechanical Systems (MEMS) gyros are often manufactured using micromachining processes and are therefore often affected by various precision defects brought by the micromachining process. For MEMS gyros, the null output error of the MEMS gyroscope is not stable due to environmental factors and exhibits drift characteristics over time, which seriously limits the usability of the MEMS gyroscope in more accurate applications. This paper studies a method to improve the temperature stability of zero error of MEMS gyroscope. By analyzing the characteristics of gyroscopic motion and the main error sources, it is clarified that the coupling of gyroscopic driving force to the detection direction is one of the main causes of the occurrence of zero-bias error in-phase component and temperature drift. In order to restrain the gyro driving force from coupling, a method of applying the compensating electrostatic force to the gyro detecting axis is proposed. The results of temperature test show that the temperature stability of in-phase components of gyroscope zero offset increases more than 3 times from 12 ℃ to 60 ℃ after the compensation is applied.