氮化是一种常用的表面处理方法,常用来提高金属的耐磨性,延长疲劳寿命,及提高(表面)硬度等。最初,氮化只是一种在温度达1000F(540℃)的活性气体或熔融盐浴中进行的化学处理法。由于这些工艺方法费用高,周期长,人们研究了一种替代工艺——离子氮化。但离子氮化也不是没有问题的,而另一种工艺——离子束氮化是目前较为有效的工艺。离子束技术为人所知已有很长一段时间。离子源巳在一些厂家得到了应用。在微电子工业中,这项工艺已被广泛用于蚀刻和 Nitriding is a commonly used surface treatment method, commonly used to improve the wear resistance of metals, extend the fatigue life, and improve (surface) hardness. Initially, nitridation was just a chemical treatment conducted in an active gas or molten salt bath at temperatures up to 1000F (540 ° C). Due to the high cost and long duration of these processes, one alternative process, ion nitriding, has been investigated. However, ion nitriding is not without problems, and another process - ion beam nitriding is the more effective technology. Ion beam technology is known for a long time. Ion sources have been used in some manufacturers. In the microelectronics industry, this process has been widely used for etching and