提出了根据变形测量和形貌测量的关系测量物体三维形貌的方法。利用电子散斑干涉(ESPI)测量物体面形时,物体偏转微小角度会引入附加的物面高度差,从而引入载波条纹。分析了物面偏转角度和附加高度差之间的关系,得出了物面相位和物面高度之间的映射关系。物面的相位由傅里叶变换法求得。对球冠面形进行了测量,实验表明,在物面上产生干涉载波条纹,进而测量物面面形,具有灵敏度高的优点。 A method of measuring the three-dimensional topography of an object based on the relationship between deformation measurement and topography measurement is proposed. When measuring speckles using Electronic Speckle Pattern Interferometry (ESPI), a small angle of object deflection introduces additional object-height differences that introduce carrier fringes. The relationship between object-surface deflection angle and additional height difference is analyzed, and the mapping relationship between object-phase and object-height is obtained. The phase of the object surface is obtained by the Fourier transform method. The spherical crown has been measured. Experiments show that interference fringes are generated on the object surface, and then the object surface shape is measured, which has the advantages of high sensitivity.