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用Ｗ－Ｍ模型模拟了分形表面并用所设计的分形算法对其进行分形分析，分析结果与理论值相符，最后，用该分形算法对ＳＴＭ检测的超精密表面微观形貌进行分析．
The W-M model was used to simulate the fractal surface and fractal analysis was carried out by using the fractal algorithm. The analysis results are consistent with the theoretical values. Finally, the fractal algorithm was used to analyze the microscopic morphology of the ultra-precision surface.