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报道用束传播法(PropagatingBeamMethod)模拟设计、指导硅大断面单模脊形光波导的制备工艺。应用傅里叶交换法计算了硅光波导中导模的传播常数。对实际研制成功的SIMOX及Si/GexSi1-x/Si单模脊形光波导,比较了其性能差异并给予理论解释。
Reported the use of PropagatingBeamMethod simulation method to guide the preparation of silicon large cross-section single-mode ridge optical waveguide preparation. The Fourier transform method was used to calculate the propagation constant of guided mode in silicon optical waveguide. The SIMOX and Si / GexSi1-x / Si single mode ridge optical waveguides successfully developed are compared and their theoretical differences are compared.