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利用真空喷射沉积技术制备厂Zn纳米颗粒薄膜，研究了工艺参数对薄膜形貌及晶体结构的影响规律，给出了颗粒尺度和外形随Ar气流量、蒸发源温度、喷嘴尺寸形状和沉积时间的变化规律，并对其机理进行了分析。
The Zn nanoparticle films were prepared by vacuum spray deposition technique. The effects of technological parameters on the morphology and crystal structure of the films were studied. The particle size and shape were given with Ar gas flow rate, evaporation source temperature, nozzle size, shape and deposition time The law of change and the analysis of its mechanism.