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计量光栅技术,作为精确的长度与角度的数字测量、数字控制、自动测量与动态测试的强有力手段,在科学技术各方面的应用日益广泛,近年来又登上三维测量的午台,研究十分活跃。本文力图综述光栅技术在长度、角度以及三维测量方面的某些进展,并加以初步分析与评价。一、高精度光栅传感器:光栅测量系统的精度,是整个系统光学、电子学以及机械特性的函数。近十年来,由于在计量光栅制造、光栅传感器,电
Metering grating technology, as an accurate means of digital measurement, digital control, automatic measurement and dynamic testing of length and angle, is widely used in all aspects of science and technology. In recent years, it has boarded a three-dimensional survey of the afternoon platform. active. In this paper, we try to summarize some progresses of grating technology in terms of length, angle and three-dimensional measurement, and make preliminary analysis and evaluation. First, the high-precision grating sensor: grating measurement system accuracy, the entire system of optics, electronics and mechanical properties of the function. In the past ten years, due to the manufacture of grating, grating sensor, electricity meter