1、开头语 利用潘宁放电的溅射离子泵,在日本大约十年前作为商品登上市场。作为超高真空泵来说,当时曾在日本的真空学术界得到了很高的评价,但是,也遭到了许多严厉的批评。这是因为当时的溅射离子泵与原来的油扩散泵相比较抽气速率小,抽气量小,起动费时间,价格也昂贵。因此,这 1, beginning with Penning discharge sputtering ion pump, about 10 years ago in Japan as a commodity to board the market. As an ultra-high vacuum pump, it was highly praised by the vacuum academic community in Japan at that time, but many severe criticisms were also made. This is because the sputtered ion pump at the time compared with the original oil diffusion pump pumping speed is small, pumping a small amount of starting time, the price is expensive. So this