本文讨论了以零价铁代替亚铁盐形成类芬顿反应(Fenton-Kind process)体系应用于碳化硅光学材料抛光过程中的反应机理,通过双转子研抛机床对SiC光学材料进行了研抛实验,验证了类芬顿反应能够有效地提高SiC材料的加工效率和加工质量。通过对比不同磨料粒度研抛液加工结果,获得了SiC材料研抛过程中化学与机械作用规律。 In this paper, the reaction mechanism of Fenton-Kind process with zero-valent iron instead of ferrous salt in the polishing process of silicon carbide optical material is discussed. The SiC optical material is polished by double-rotor polishing machine Experiments show that the Fenton-like reaction can effectively improve the processing efficiency and processing quality of SiC materials. By comparing the results of different abrasive particle size of the slurry, the chemical and mechanical rules of SiC material during polishing were obtained.