论文部分内容阅读
本文介绍了已经用于激光球面干涉仪中的用锯齿形衍射定向光栅作检测元件的高精度数字位移测量系统,系统用电子运算器修正光栅常数的办法获得了0.1μm 的分辨率和在20mm 量限内优于0.2μm 的精度,这一系统的主要优点是精度高,结构简单,调正方便,缺点是对机械导轨精度要求较高,因此适用于精度高,但量程不太大(例如<100mm)的位移测量系统。
This paper introduces a high precision digital displacement measurement system that has been used in the laser spherical interferometer with a zigzag diffraction grating. The system uses the electronic operator to correct the grating constant to obtain a resolution of 0.1μm and a resolution of 20mm The main advantages of this system are high precision, simple structure and convenient adjustment. The disadvantage is the high precision of the mechanical guide rail, so it is suitable for high precision, but the range is not too large (for example, < 100mm) displacement measurement system.