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采用材料逐层去除与逐层光扫描相结合的方法，能同时测量具有复杂内外轮廓的零件，且内外轮廓具有相同的精度．根据要求，系统的精度可达到５．４μｍ，分辨力可达到２．６μｍ．系统地阐述了该系统的测量原理和测量的各部分组成．在开发的样机上用标准量块对系统的层析图像精度进行了分析及标定
The method of material layer by layer removal combined with layer-by-layer optical scanning enables the simultaneous measurement of parts with complex inner and outer contours with the same precision of the inner and outer contours. On request, the system’s accuracy can reach 5.4μm, resolution can reach 2.6μm. Systematically describes the measurement principle of the system and the measurement of the various components. In the development of the prototype with a standard block on the system of tomographic image accuracy analysis and calibration