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大面积 Si O2 厚膜沉积可创造很高的附加值 ,但在规模生产中会出现严重的膜层损伤。本文针对这一现象进行机理探讨。
Large area Si O2 thick film deposition can create very high added value, but in the scale of production there will be serious damage to the film. This paper discusses the mechanism of this phenomenon.