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本文首次提出利用ｎ＋ 重掺杂层的慢波效应研制 Ｍａｃｈ Ｚｅｈｎｄｅｒ 干涉型行波光调制器，并通过在介电常数εｒ 中引入与电导率有关的虚部σ／ωε０，拓展了直线法对介质损耗的计算，从而就该调制器的各结构参数对其微波特性的影响进行了详细的理论分析计算。由此我们确定了可以同时达到光波与微波速度匹配且损耗最小的器件设计参数，其理论带宽可达３０ Ｇ Ｈｚ。然后在理论分析结论的基础上提出了改进的优化结构，通过在 Ｍ Ｚ型调制器的两个光波导之间挖槽，突破了传统 Ｍ Ｚ结构中电极间距的严格限制，达到缩小电极间距，减小光波导层厚度的目的，进而使理论带宽大幅提高，为研制工作奠定了基础。
In this paper, the Mach-Zehnder interferometric traveling-wave optical modulator is proposed for the first time by using the slow wave effect of n + heavily doped layer. By introducing the imaginary part σ / ωε0 related to the conductivity into the permittivity εr, Loss of the calculation, and thus the various structural parameters of the modulator of its microwave characteristics of a detailed theoretical analysis and calculation. As a result, we have determined that the design parameters of a device that can simultaneously achieve both light-to-microwave speed matching and minimal loss have a theoretical bandwidth of up to 30 G Hz. Then based on the theoretical analysis, an improved optimized structure is proposed. By grooving the two optical waveguides in the M-Z modulator, the strict limits of the electrode spacing in the conventional M-Z structure are overcome, Pitch, reduce the thickness of the optical waveguide layer purpose, thereby enabling a substantial increase in theoretical bandwidth, laid the foundation for the development.