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在工艺参数实验和理论设计分析的基础上,制备了包括多孔硅Bragg反射镜、多孔硅微腔和稳定性很好的多孔硅三元结构在内的多孔硅一维光子晶体,对3种多孔硅光子晶体的结构进行了表征,不同孔隙度的多孔硅呈现出周期性的排列。采用单光束反射Z扫描方法分别对3种结构的多孔硅在1 064nm波长处的非线性折射率进行了测量。实验结果表明,多孔硅三元结构光子晶体的三阶非线性折射率比多孔硅Bragg反射镜和多孔硅微腔高1个数量级,这将为多孔硅一维光子晶体用于先进光电器件的设计提供了重要参考。
Based on the experimental and theoretical design of the process parameters, a one-dimensional photonic crystal of porous silicon including porous silicon Bragg reflector, porous silicon microcavity and porous silicon ternary structure with good stability was prepared. Three types of porous silicon The structure of silicon photonic crystal was characterized by the periodic arrangement of porous silicon with different porosity. The nonlinear refractivity of 3 types of porous silicon at 1 064 nm wavelength was measured by single beam reflection Z-scan method. The experimental results show that the third-order nonlinear refractive index of the porous silicon ternary structure photonic crystal is one order of magnitude higher than that of the porous silicon Bragg reflector and the porous silicon microcavity, which will be used for the design of advanced optoelectronic devices with the porous silicon one-dimensional photonic crystal Provide an important reference.