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本文采用丝网印刷技术制备了具有高粘接性能的碳纳米管冷阴极.该碳纳米管冷阴极在直流连续及脉冲场下均具有优异的场发射性能,同时具有高发射电流密度与发射总电流,可以满足高功率器件对冷阴极电子源的使用需求.在直流连续场下,该冷阴极的电流发射密度可达到207.0 mA cm~(-2)(电场强度为4.5 Vμm~(-1)).在脉冲场(200 Hz,10μs)激发下,峰值电流密度最高可达4.5 A cm~(-2)(电场强度为103 Vμm~(-1)),同时具有高的峰值发射电流(315.8 mA).为观察阴极发射均匀性,采用荧光板为阳极进行实时监测,发现此印刷阴极发射较均一;稳定性测试表明该阴极在连续及脉冲场下均具有良好的发射稳定性.该冷阴极同时具有高电流密度及高发射电流,可以满足高功率真空电子器件的使用要求,在真空微纳电子器件中显示出巨大的应用前景.
In this paper, the carbon nanotube cold cathode with high adhesion properties was prepared by screen printing technology.The cold cathode of carbon nanotubes has excellent field emission performance in both DC continuous and pulsed fields with high emission current density and total emission Current can meet the requirement of cold cathode electron source for high power devices.Under DC continuous field, the current density of the cold cathode can reach 207.0 mA cm -2 (electric field strength is 4.5 Vμm -1) ) Peak current density is up to 4.5 A cm -2 (electric field intensity is 103 Vμm -1) at high pulse current (200 Hz, 10μs) and high peak emission current (315.8 mA) .In order to observe the uniformity of cathode emission, real-time monitoring of the cathode using a fluorescent plate was carried out and found that the cathodic emission of this printing was more uniform. The stability test showed that the cathode had good emission stability under both continuous and pulsed discharge. At the same time with high current density and high emission current, to meet the requirements of high-power vacuum electronic devices, vacuum micro-nano electronic devices show a huge application prospects.