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提出一种新的高精度大型平面扫描仪。利用双光束补偿系统，扫描头由一特殊光路组成。当入射光通过此光路后，产生对称输出的两束光。当入射光发生角漂或扫描头发生摆动时，输出的两束光对称上下漂移，其中心线保持不变，故扫描形成的基准面保持不变，从而大大提高了测量精度。经实验证明，测量精度优于2．5×10－6。
Proposed a new high-precision large-scale plane scanner. Using a double beam compensation system, the scan head consists of a special light path. After the incident light passes through this optical path, two beams of light that are symmetrically output are generated. When the incident light occurs angular drift or scan head swing occurs, the output of the two symmetrical light drift up and down, the centerline remains unchanged, so the scan of the reference surface remains unchanged, thus greatly improving the measurement accuracy. The experiment proved that the measurement accuracy is better than 2.5 × 10-6.