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本文对建筑玻璃大面积多蒸发源真空蒸镀的膜厚均匀性进行了理论分析,给出了膜厚及其分布的计算公式和计算实例.对如何提高薄膜的均匀性进行了讨论.
In this paper, the thickness uniformity of large area multi-evaporation glass vacuum evaporation of building glass was theoretically analyzed. The calculation formulas and calculation examples of film thickness and its distribution were given. How to improve the uniformity of the film is discussed.