Study on pulsed laser ablation and deposition of ZnO thin films by L-MBE

来源 :中国科学E辑(英文版) | 被引量 : 0次 | 上传用户:tsy99
下载到本地 , 更方便阅读
声明 : 本文档内容版权归属内容提供方 , 如果您对本文有版权争议 , 可与客服联系进行内容授权或下架
论文部分内容阅读
ZnO, as a wide-band gap semiconductor, has recently become a new research focus in the field of ultraviolet optoelectronic semiconductors. Laser molecular beam epitaxy (L-MBE) is quite useful for the unit cell layer-by-layer epitaxial growth of zinc oxide thin films from the sintered ceramic target. The ZnO ceramic target with high purity was ablated by KrF laser pulses in an ultra high vacuum to deposit ZnO thin film during the process of L-MBE. It is found that the deposition rate of ZnO thin film by L-MBE is much lower than that by conventional pulsed laser deposition (PLD). Based on the experimental phenomena in the ZnO thin film growth process and the thermal-controlling mechanism of the nanosecond (ns) pulsed laser ablation of ZnO ceramic target, the suggested effective ablating time during the pulse duration can explain the very low deposition rate of the ZnO film by L-MBE. The unique dynamic mechanism for growing ZnO thin film is analyzed. Both the high energy of the deposition species and the low growth rate of the film are really beneficial for the L-MBE growth of the ZnO thin film with high crystallinity at low temperature.
其他文献
介绍了兰州重离子加速器(HIRFL)束流相位测量装置.该装置基于双平衡混频原理,采用了高频信号混频滤波技术,具有较高的测量灵敏度.通过安装在加速器中的容性感应探针探测等时
Recently some P2P systems have constructed the small world network using the small world model so as to improve the routing performance. In this paper, we propo
Let ∑ be a convex hypersurface in the Euclidean space R4 with mean curvature H. We obtain a geometric lower bound for the Willmore functional f∑ H2dσ. This b
This article reports a preliminary research on silicate-incorporated hydroxyapatite as a new environmental mineral used to remove cadmium ions from aqueous solu
Aiming at the problem of reverse-design of mechanism, a method based on the matching of trajectory code-chains is presented. The motion trajectory of mechanism
The effects of polyhydroxylated [C60] fullerene derivatives fullerols on DNA was studied, using the plasmid pXJ41-neo DNA as the experimental model. The cleaved
本文通过对荣华二采区10
The SCR reaction mechanism of NO with C3H6catalyzed by CuO was studied by the method of Density Functional Theory (DFT) at the B3LYP/LanL2DZ levels. The optimiz
A 3-D impedance method has been introduced to compute the electric currents induced in a human body exposed to extremely low-frequency electromagnetic field.The
Since in most blind source separation (BSS) algorithms the estimations of probability density function (pdf) of sources are fixed or can only switch between one