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本文自行研制了一台Fabry—Perot干涉仪及其用于探测超声信号的测试系统。利用该系统对非光学表面的铝板和铜板实现了nm级窄脉冲激光超声信号的非接触式检测,其信噪比足以满足进一步信号处理要求。
This paper developed a Fabry-Perot interferometer and its test system for detecting ultrasonic signals. Using this system, the non-contact detection of nm-level narrow pulse laser ultrasonic signal on the non-optical surface aluminum plate and copper plate is realized, and the signal-to-noise ratio is enough to meet the requirement of further signal processing.