论文部分内容阅读
真空检漏技术广泛应用于航天、航空、核工业等军工行业的密封产品测试,近些年,无油真空泵逐步代替了油封式机械泵作为检漏系统的前级泵。无油泵作为前级泵具有清洁无油的优点,但实践中经常出现检漏系统本底异常升高、检漏系统有效最小可检漏率与理论分析结果相差较大的情况。本文从检漏系统有效最小可检漏率的影响因素入手,结合容积式真空泵工作原理,分析了无油泵对检漏系统有效最小可检漏率的影响原因,并进行了实验验证,给出了改进建议。
Vacuum leak detection technology is widely used in the aerospace, aviation, nuclear industry and other military industries sealed product testing, in recent years, oil-free vacuum pump gradually replaced the oil-sealed mechanical pump as a leak detection system before the pump. Non-oil pump as a front-stage pump has the advantages of clean and oil-free, but in practice the leak detection system often abnormal increase in the background, the leak detection system effective minimum leak rate and the theoretical analysis of a big difference between the situation. Based on the working principle of positive displacement vacuum pump, this paper analyzes the factors that affect the effective minimum leak rate of leak detection system, and analyzes the reasons for the effective minimum leak detection rate of the leak detection system. The experimental results show that Suggestions for Improvement.