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在微位移定位平台设计中,为充分利用桥式机构放大比高的优势,同时使其具有较高的定位精度,在桥式机构的基础上引入了运动导向机构,设计了一种改进型的柔顺微位移定位平台.根据材料力学原理和卡氏定理,推导了该定位平台的放大倍数和固有频率表达式.然后通过有限元软件,对微定位平台的放大倍数和固有频率进行仿真,并与理论计算结果进行了分析对比.最后搭建了微定位实验系统来测试所设计的平台的性能.实验结果表明:该改进型平台的放大比为6.4,固有频率为345.0 Hz.理论模型与有限元仿真得到的放大倍数和固有频率的相对误差分别为2.9%和3.6%,与实验测得的放大比和固有频率的相对误差分别为6.7%和6.8%.实验结果验证了理论模型的正确性.
In the design of micro-displacement positioning platform, in order to make full use of the advantages of the bridge mechanism with high magnification ratio and high positioning accuracy, a motion guide mechanism is introduced on the basis of the bridge mechanism, and an improved Which is based on the principle of mechanics of materials and the Karnofsky theorem.The magnification and natural frequency expression of the positioning platform are deduced.Then the magnification and natural frequency of the micro-positioning platform are simulated by finite element software, The theoretical calculation results are analyzed and compared.Finally, a micro-positioning system is set up to test the performance of the designed platform.The experimental results show that the improved platform has a magnification ratio of 6.4 and a natural frequency of 345.0 Hz.The theoretical model and finite element simulation The relative errors between magnification and natural frequency were 2.9% and 3.6%, respectively, and the relative errors between magnification and natural frequency were 6.7% and 6.8% respectively. The experimental results verify the correctness of the theoretical model.